UV Activation Treatment for Hydrophobic Wafer Bonding

Journal article

S. L Holl, C. A Colinge, K. D Hobart and F. J Kub

Journal of the Electrochemical Society, Vol.153(7), pp.G613-G616

2006

Handle:

https://hdl.handle.net/20.500.12741/rep:3928

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Title: UV Activation Treatment for Hydrophobic Wafer Bonding
Creators: S. L Holl
C. A Colinge
K. D Hobart
F. J Kub
Academic Unit: Mechanical Engineering Department
Publication Details: 2006
Identifiers: 99257847412401671; https://hdl.handle.net/20.500.12741/rep:3928; https://doi.org/10.1149/1.2196673
Language: English