- Title
- Reaction Dynamics of Activated Hydrophobic Silicon for Low-Temperature Wafer Bonding
- Creators
- M. P BreninfordC. A ColingeS. L HollK. D HobartF. J Kub
- Academic Unit
- Mechanical Engineering Department
- Publication Details
- 2009
- Identifiers
- 99257847402201671; https://hdl.handle.net/20.500.12741/rep:5006; https://doi.org/10.1149/1.3080639
- Language
- English
Journal article
Reaction Dynamics of Activated Hydrophobic Silicon for Low-Temperature Wafer Bonding
Journal of the Electrochemical Society, Vol.156(5), pp.H303-H306
2009
Handle:
https://hdl.handle.net/20.500.12741/rep:5006
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