- Title
- Optimization of Silicon-Silicon Adhesive Wafer Bonding
- Creators
- Susan L HollSrinivasulu KorrapatiC Colinge
- Academic Unit
- Mechanical Engineering Department
- Publication Details
- 12/17/2019
- Identifiers
- 99257847097301671; https://hdl.handle.net/20.500.12741/rep:4917; https://doi.org/10.1149/1.3483519
- Language
- English
Journal article
Optimization of Silicon-Silicon Adhesive Wafer Bonding
ECS transactions, Vol.33(4), pp.297-306
12/17/2019
Handle:
https://hdl.handle.net/20.500.12741/rep:4917
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