Fabrication Techniques for Thin-Film Silicon Layer Transfer

Journal article

Susan Holl, Ravi Varasala, Harshdeep Jawanda, C. A Colinge, K. D Hobart, Fritz J Kub and Scott Song

ECS transactions, Vol.3(6), pp.67-73

12/21/2019

Handle:

https://hdl.handle.net/20.500.12741/rep:3841

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Title: Fabrication Techniques for Thin-Film Silicon Layer Transfer
Creators: Susan Holl
Ravi Varasala
Harshdeep Jawanda
C. A Colinge
K. D Hobart
Fritz J Kub
Scott Song
Academic Unit: Mechanical Engineering Department
Publication Details: 12/21/2019
Identifiers: 99257847578001671; https://hdl.handle.net/20.500.12741/rep:3841; https://doi.org/10.1149/1.2357055
Language: English