Abstract
The use of electrostatic forces for millimeter-scaled linear actuation is explored through simulated application. Typically used in MEMs, the increased scaling in size of electrostatic devices leads to diminishing accelerations for actuation, as the surface-dependent electrostatic forces increase by a factor less than the mass. The linear actuator considered is powered at 18kV, moving in 3mm increments, with a step time of 1.33 seconds.